Cover Feature: Atomic Layer Deposition of Ternary Indium/Tin/Aluminum Oxide Thin Films, Their Characterization and Transistor Performance under Illumination. (Chem. Eur. J. 38/2021)
نویسندگان
چکیده
Lesser is better: Multilayered heterostructures comprising of In2O3, SnO2, and one or two atomic layers Al2O3 were studied for their application in thin-film transistors (TFT). The cover image centers around the fabrication a multilayer thin film oxide aggregate which works as semiconductor transistor device. It composed different In2O3 fabricated using layer deposition (ALD) technique employs reaction suitable organometallic precursors with water, all originate from gas phase an individual molecular source (left upper side). rainbow reflects stability material against illumination. background depicts universal binary 0/1 code representing every-day use our modern society. More information can be found Full Paper by J. Schneider et al. (DOI: 10.1002/chem.202101126).
منابع مشابه
architecture and engineering of nanoscale sculptured thin films and determination of their properties
چکیده ندارد.
15 صفحه اولAtomic layer deposition and properties of ZrO2/Fe2O3 thin films
Thin solid films consisting of ZrO2 and Fe2O3 were grown by atomic layer deposition (ALD) at 400 °C. Metastable phases of ZrO2 were stabilized by Fe2O3 doping. The number of alternating ZrO2 and Fe2O3 deposition cycles were varied in order to achieve films with different cation ratios. The influence of annealing on the composition and structure of the thin films was investigated. Additionally, ...
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ژورنال
عنوان ژورنال: Chemistry: A European Journal
سال: 2021
ISSN: ['0947-6539', '1521-3765']
DOI: https://doi.org/10.1002/chem.202102030